Jianyong Chen, Xiaoyan Chen, Chundong Zhao
College of Electronic Information and Automation, Tianjin University of Science and Technology, China
pp. 46-49
ABSTRACT
Wafer defect detection is an indispensable part of semiconductor manufacturing. In this paper, an automatic and efficient device is designed and constructed to detect wafer physical defects. Programmable logic controllers (PLCs) are used as the controller of the transmission mechanism of the device, and the servo motor is used for driving. Wafer images are captured by a CMOS camera. In addition, in order to improve the detection accuracy, the camera calibration is completed according to the mapping relationship between the pixel coordinate system and the world coordinate system. A computer is adopted for wafer image processing and displaying the final detection results. The device proposed in this paper has low cost and high reliability. It provides a new solution for wafer defect detection.

ARTICLE INFO
Article History
Received 10 November 2019
Accepted 17 July 2020

Keywords
Semiconductor manufacturing
Machine vision
Camera calibration
Programmable logic controller

JAALR1109

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